Semiconductor & MEMS Foundry

Research Innovation Center

DALSA and the Microelectronics Innovation Center

The microelectronics innovation center in Technoparc Bromont is a major collaboration formally launched in 2009 between the Université de Sherbrooke, the governments of Quebec and Canada, and industry partners IBM Canada and DALSA for advanced market-driven scientific research and experimental development in microelectronics assembly.

The mission of the Center is to create a global center of excellence for advanced research in microelectromechanical systems (MEMS) and assembling silicon chips.

The Center intends to leverage the best from the Canadian and International research community to address industry’s most challenging problems. The end goal is technology transfer as well as development of spinoffs. The Center has already received letters of interest from universities, research centers and other industrial partners from across Canada and around the world.
 

DALSA's Involvement

The focus of DALSA's contribution to the center will be in advancing the boundaries of MEMS and Wafer Level Packaging. As a founding partner, DALSA will contribute to the center's MEMS and 3D WLP equipment as well as associated selection, installation and ongoing maintenance and operation. DALSA will develop standard recipes for each of the pieces of MEMS/WLP equipment with the goal of providing a turnkey operation where center members will be able to build a wide variety of prototype devices.

The Innovation Center is a tremendous opportunity for DALSA's future growth. We will have opportunities to work in collaboration with researchers from the University of Sherbrooke and other universities and research centers to speed up technology development. And as we complete the addition of 200 mm MEMS capability to our own foundry, our involvement with the center will allow us to work on the latest 200 mm equipment for advanced prototyping which will allow us to shorten the time to market for our customers. Through the advanced equipment deployed at the center for research, we will gain the ability to introduce gold, copper, and other non-CCD compatible materials to our toolkit of MEMS capabilities, effectively opening up new market opportunities including radio frequency (RF) MEMS and BioMEMS/Lab-on-a-chip.

In the words of DALSA CEO Brian Doody:
"Innovation has been fundamental to DALSA’s past success, and it is equally fundamental to our future. Therefore we are very excited to be a founding partner in the new innovation center’s 200 mm MEMS and 3D microelectronics fabrication unit. We anticipate that the technologies invented and developed in the Center will bring novel capabilities to produce new, integrated, intelligent products to areas such as microfluidics for medical applications and photonics for high bandwidth communication applications. This may be the first time in Canada that such a concentration of diverse areas of research and innovation meet and collaborate under the same roof."

Frequently Asked Questions

Who is funding the Center?
Total investment for this project is $218.45 M. The Government of Canada is contributing $82.95 M and the Government of Quebec is contributing $94.9 M. The balance of the start up funding is being supplied by industry and equipment supplier donations.

The founding institutions, along with any new members that join the Center at a later date along with users of the Center's facilities will fund the ongoing operational costs of the Center. DALSA will be specifically responsible for the ongoing maintenance and operation of the MEMS portion of the Center along with shared funding for common areas. <

Where will the center be located?
The center will be located in the heart of the Technoparc Bromont, in Bromont, Quebec – the semiconductor manufacturing capital of Canada.

What MEMS facilities will the center offer?
The center will house the world’s most advanced 200 mm MEMS/WLP equipment and infrastructure and will focus on solving the industry's most technically challenging problems.

How will the center benefit DALSA's customers?
In addition to collaboration with leading researchers to speed technology development, DALSA will benefit from access to advanced equipment to speed prototyping and reduce time to market for customer designs.

How much business does DALSA do in MEMS?
Our MEMS business has experienced some of the fastest growth among pure-play MEMS foundries:

  • $28 million in MEMS revenue in 2008 (30%+ growth vs 2007)
  • 30%+ growth first half of 2009 vs first half of 2008 (one of the only MEMS foundries to grow in 2009)
  • Currently in volume production with several high profile customers

More Information

MEMS Brochure

 Download DALSA's MEMS Brochure

MEMS Toolbox

Learn more about DALSA's MEMS fabrication capabilities and exceptional MEMS toolbox.

Integrated MEMS

Learn more about DALSA's capabilities in TSVs, 3D wafer level packaging, Bio-MEMS and more.

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